Vertical transport FET devices having a sacrificial doped layer

ABSTRACT

Methods of fabrication and semiconductor structures includes vertical transport field effect transistors (VTFETs) including a top source/drain extension formed with a sacrificial doped layer. The sacrificial doped layer provides the doping source to form the extension and protects the top of the fin during fabrication so as to prevent thinning, among other advantages.

DOMESTIC PRIORITY

This application is a divisional of U.S. application Ser. No. 15/951,510entitled “VERTICAL TRANSPORT FET DEVICES HAVING A SACRIFICIAL DOPEDLAYER,” filed Apr. 12, 2018, incorporated herein by reference in itsentirety.

BACKGROUND

The present invention relates in general to semiconductor fabricationmethods and resulting structures. More specifically, the presentinvention relates to methods of fabricating vertical transport fieldeffect transistors including a sacrificial doped layer for forming thetop source/drain extension regions.

Field effect transistors (FETs) are commonly employed in electroniccircuit applications. FETs can include a source region and a drainregion spaced apart by a semiconductor channel region. A gate,potentially including a gate dielectric layer, a work function metallayer, and a metal electrode, can be formed above the channel region. Byapplying voltage to the gate, the conductivity of the channel region canincrease and allow current to flow from the source region through thechannel to the drain region.

Vertical Transport FETs (VTFET) are one of the promising alternatives tostandard lateral FET structures due to benefits, among others, in termsof reduced circuit footprint. VTFETs employ semiconductor fins andside-gates that can be contacted outside the active region, resulting inincreased device density and some increased performance over lateraldevices. In VTFETs, the source to drain current flows in a directionthat is perpendicular to a major surface of the substrate. For example,in a known VFET configuration a major substrate surface is horizontaland a vertical fin extends upward from the substrate surface. The finforms the channel region of the transistor. A source region and a drainregion are situated in electrical contact with the top and bottom endsof the channel region, while a gate is disposed on one or more of thefin sidewalls.

SUMMARY

Embodiments of the present invention are generally directed tointegrated circuits including one or more vertical field effecttransistors and methods of fabrication. A non-limiting example of amethod for forming a vertical field effect transistor includesdepositing a hardmask on a substrate including an epitaxially grown etchstop layer and an epitaxially grown sacrificial doped layer. Thehardmask overlays the epitaxially grown sacrificial doped layer.Patterning the substrate forms one or more fin channels, wherein thepatterned hardmask, patterned etch stop layer, and the patternedsacrificial doped layer overlay each of the one or more fin channels.Bottom source/drain regions are formed adjacent the one or more finchannels on the substrate. A bottom spacer layer is formed on the bottomsource/drain regions. A doped top portion and a doped bottom portion areformed in each of the one or more fin channels. A high k metal gatestructure is formed about each of the one or more fin channels. A linerlayer is formed on the high k metal gate structure. An interlayerdielectric is deposited on the substrate. A portion of the interlayerdielectric and the high k metal gate structure is selectively removedstopping at the hardmask. The hardmask, the doped sacrificial layer, andthe etch stop layer overlaying each of the one or more fin channels areselectively removed. A portion of the high k metal gate structure isselectively removed to form a recess between the liner layer and the topdoped portion of the one or more fin channels. The recess is filled witha top spacer material and a source/drain material is epitaxially grownon the doped top portion of the one or more fin channels to form thevertical field effect transistor.

A non-limiting example of a method of forming one or more vertical fieldeffect transistors in an integrated circuit according to aspects of theinvention includes forming one or more vertical fin channels in asilicon substrate including thereon an epitaxially grown undopedsilicon-germanium layer and a doped epitaxially grown silicon layer onthe undoped silicon germanium layer. A bottom source/drain isepitaxially grown adjacent each of the one or more vertical finchannels. Dopant ions from the bottom source/drain region are diffusedinto each lower portion of the one or more vertical fin channels to forma doped bottom portion and dopant ions from the doped epitaxially grownsilicon layer are diffused into each top portion of the one or morevertical fin channels to form a doped top portion. A gate structure isformed about each of the one or more vertical fin channels and aninterlayer dielectric is deposited. The interlayer dielectric ispatterned and the doped epitaxially grown silicon layer and theepitaxially grown undoped silicon-germanium layer is removed from theone or more vertical fin channels. A top source/drain is epitaxiallygrown on the doped top portion of each of the one or more vertical finchannels to define the one or more vertical field effect transistors.

A non-limiting example of a structure for forming a vertical fieldeffect transistor according to aspects of the invention includes avertical fin channel having a lower diffusion doped portion and an upperdiffusion doped portion provided on a substrate. Epitaxially grownbottom source/drain region are adjacent each side of the vertical finchannel. A gate structure surrounds the at least one vertical finchannel and an epitaxially grown top source/drain region is on the upperdoped portion of the vertical fin channel.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts a cross sectional view of a semiconductor structureincluding a sacrificial doped layer and an etch stop layer in accordancewith one or more embodiments;

FIG. 2 depicts a cross sectional view of the semiconductor structure ofFIG. 1 subsequent to fin formation in accordance with one or moreembodiments;

FIG. 3 depicts a cross sectional view of the semiconductor structure ofFIG. 2 subsequent to bottom source/drain formation in accordance withone or more embodiments;

FIG. 4 depicts a cross sectional view of the semiconductor structure ofFIG. 3 subsequent to bottom spacer formation in accordance with one ormore embodiments;

FIG. 5 depicts a cross sectional view of the semiconductor structure ofFIG. 4 subsequent to junction formation at the top and bottom of the finby high temperature doping in accordance with one or more embodiments;

FIG. 6 depicts a cross sectional view of the semiconductor structure ofFIG. 5 subsequent to high k/metal gate formation in accordance with oneor more embodiments;

FIG. 7 depicts a cross sectional view of the semiconductor structure ofFIG. 6 subsequent to hard mask exposure in accordance with one or moreembodiments;

FIG. 8 depicts a cross sectional view of the semiconductor structure ofFIG. 7 subsequent to hard mask removal in accordance with one or moreembodiments;

FIG. 9 depicts a cross sectional view of the semiconductor structure ofFIG. 8 subsequent to doped sacrificial layer in accordance with one ormore embodiments;

FIG. 10 depicts a cross sectional view of the semiconductor structure ofFIG. 9 subsequent to etch stop layer removal in accordance with one ormore embodiments;

FIG. 11 depicts a cross sectional view of the semiconductor structure ofFIG. 10 subsequent to high k/metal gate recess in accordance with one ormore embodiments;

FIG. 12 depicts a cross sectional view of the semiconductor structure ofFIG. 11 subsequent to top spacer formation in accordance with one ormore embodiments; and

FIG. 13 depicts a cross sectional view of the semiconductor structure ofFIG. 12 subsequent to epitaxial formation of top source/drain inaccordance with one or more embodiments.

DETAILED DESCRIPTION

The present invention is generally directed to methods and verticaltransport field effect transistor (VTFET) structures for forming topsource/drain extension regions for the VTFET structure, which reduce theexternal resistance between the channel and the top source/drain.Currently, the process flow for forming VTFET structures has strictconstraints on thermal budget for downstream processing steps becausethe high k metal gate module is formed early in the process. The topsource/drain junction formation is one of the biggest challenges as itcurrently requires a high temperature anneal. Early top source/drainjunction epitaxial schemes are currently employed to overcome thethermal budget issues, but it suffers from top fin loss. The highlydoped top/source drain extension regions becomes skinny by downstreamprocesses such as the reactive ion etch processes and thedeposition/etch/annealing steps. In the present invention, methods andstructure are provided that overcome the prior art issues by forming thetop source/drain extension regions with a sacrificial doped layer, whichis later removed. As will be described in greater detail, thesacrificial doped layer provides the desired doping source to form theextension and also provides a protective layer to protect the fin topduring processing.

The following definitions and abbreviations are to be used for theinterpretation of the claims and the specification. As used herein, theterms “comprises,” “comprising,” “includes,” “including,” “has,”“having,” “contains” or “containing,” or any other variation thereof,are intended to cover a non-exclusive inclusion. For example, an articleor apparatus that comprises a list of elements is not necessarilylimited to only those elements but can include other elements notexpressly listed or inherent to such article or apparatus.

As used herein, the articles “a” and “an” preceding an element orcomponent are intended to be nonrestrictive regarding the number ofinstances (i.e. occurrences) of the element or component. Therefore, “a”or “an” should be read to include one or at least one, and the singularword form of the element or component also includes the plural unlessthe number is obviously meant to be singular.

As used herein, the terms “invention” or “present invention” arenon-limiting terms and not intended to refer to any single aspect of theparticular invention but encompass all possible aspects as described inthe specification and the claims.

Detailed embodiments of the structures of the present invention aredescribed herein. However, it is to be understood that the embodimentsdescribed herein are merely illustrative of the structures that can beembodied in various forms. In addition, each of the examples given inconnection with the various embodiments of the invention is intended tobe illustrative, and not restrictive. Further, the figures are notnecessarily to scale, some features can be exaggerated to show detailsof particular components. Therefore, specific structural and functionaldetails described herein are not to be interpreted as limiting, butmerely as a representative basis for teaching one skilled in the art tovariously employ the methods and structures of the present description.For the purposes of the description hereinafter, the terms “upper”,“lower”, “top”, “bottom”, “left,” and “right,” and derivatives thereofshall relate to the described structures, as they are oriented in thedrawing figures. The same numbers in the various figures can refer tothe same structural component or part thereof.

It should also be understood that material compounds will be describedin terms of listed elements, e.g., SiN, or SiGe. These compounds includedifferent proportions of the elements within the compound, e.g., SiGeincludes SixGe1-x where x is less than or equal to 1, and the like. Inaddition, other elements can be included in the compound and stillfunction in accordance with the present principles. The compounds withadditional elements will be referred to herein as alloys.

It should be noted that not all masking, patterning, and lithographyprocesses are shown, because a person of ordinary skill in the art wouldrecognize where masking and patterning processes are utilized to formthe identified layers and openings, and to perform the identifiedselective etching processes, as described herein.

Turning now to FIG. 1, there is shown a cross section of an exemplaryincoming semiconductor structure 10 suitable for completing fabricationof semiconductor structure including one or more VTFETs in accordancewith one or more embodiments. The semiconductor structure 10 includes abase substrate 12. The base substrate 12 can include, for example,silicon, germanium, silicon germanium, silicon carbide, and thoseconsisting essentially of III-V compound semiconductors having acomposition defined by the formulaAl_(X1)Ga_(X2)In_(X3)As_(Y1)P_(Y2)N_(Y3)Sb_(Y4), where X1, X2, X3, Y1,Y2, Y3, and Y4 represent relative proportions, each greater than orequal to zero and X1+X2+X3+Y1+Y2+Y3+Y4=1 (1 being the total relativemole quantity). Other suitable substrates include II-VI compoundsemiconductors having a composition Zn_(A1)Cd_(A2)Se_(B1)Te_(B2), whereA1, A2, B1, and B2 are relative proportions each greater than or equalto zero and A1+A2+B1+B2=1 (1 being a total mole quantity). The basesubstrate 12 can also include an organic semiconductor or a layeredsemiconductor such as, for example, Si/SiGe, a silicon-on-insulator or aSiGe-on-insulator. A portion or entire semiconductor substrate 12 can beamorphous, polycrystalline, or monocrystalline. In addition to theaforementioned types of semiconductor substrates, the base substrateemployed in the present invention can also include a hybrid oriented(HOT) base substrate in which the HOT substrate has surface regions ofdifferent crystallographic orientation. The base substrate 12 can bedoped, undoped or contain doped regions and undoped regions therein. Thebase substrate can contain regions with strain and regions withoutstrain therein, or contain regions of tensile strain and compressivestrain.

An undoped silicon germanium (SiGe) layer 14 is formed on the basesubstrate 12, which can function as an etch stop layer in the method ofmanufacture. The thickness of the undoped SiGe layer can be in a rangeof about 2 nanometers to about 5 nanometers (nm).

A sacrificial doped layer 16 is formed on the undoped SiGe layer 14. FornFET devices, Si:P can be used as the doping layer whereas for pFETdevices, SiGe:B can be used as the doping layer. The thickness of thesacrificial doped layer 16 is generally in a range of about 5 nm toabout 10 nm.

The undoped SiGe layer 14 and the sacrificial doped layer 16 can beformed by an epitaxial growth process that deposits a crystallinesemiconductor material onto selected areas of the base substrate 12. Theepitaxial growth process can include epitaxial materials grown fromgaseous or liquid precursors. Epitaxial materials can be grown usingvapor-phase epitaxy (VPE), molecular-beam epitaxy (MBE), liquid-phaseepitaxy (LPE), or other suitable process. Epitaxial silicon, silicongermanium, and/or carbon doped silicon (Si:C) silicon can be dopedduring deposition (in-situ doped) by adding dopants, n-type dopants(e.g., phosphorus or arsenic) or p-type dopants (e.g., boron orgallium), depending on the type of transistor. The dopant concentrationin the source/drain generally can range from about 1×10¹⁹ cm⁻³ to about2×10²¹ cm⁻³, or, in other embodiments, from about 2×10²⁰ cm⁻³ to about1×10²¹ cm ³.

The terms “epitaxial growth and/or deposition” and “epitaxially formedand/or grown” mean the growth of a semiconductor material (crystallinematerial) on a deposition surface of another semiconductor material(crystalline material), in which the semiconductor material being grown(crystalline overlayer) has substantially the same crystallinecharacteristics as the semiconductor material of the deposition surface(seed material). In an epitaxial deposition process, the chemicalreactants provided by the source gases are controlled and the systemparameters are set so that the depositing atoms arrive at the depositionsurface of the semiconductor substrate with sufficient energy to moveabout on the surface such that the depositing atoms orient themselves tothe crystal arrangement of the atoms of the deposition surface.Therefore, an epitaxially grown semiconductor material has substantiallythe same crystalline characteristics as the deposition surface on whichthe epitaxially grown material is formed. For example, an epitaxiallygrown semiconductor material deposited on a {100} orientated crystallinesurface will take on a {100} orientation. In some embodiments, epitaxialgrowth and/or deposition processes are selective to forming onsemiconductor surface, and generally do not deposit material on exposedsurfaces, such as silicon dioxide or silicon nitride surfaces.

In some embodiments, the gas source for the deposition of epitaxialsemiconductor material include a silicon containing gas source, agermanium containing gas source, or a combination thereof. For example,an epitaxial Si layer can be deposited from a silicon gas source that isselected from the group consisting of silane, disilane, trisilane,tetrasilane, hexachlorodisilane, tetrachlorosilane, dichlorosilane,trichlorosilane, methylsilane, dimethylsilane, ethylsilane,methyldisilane, dimethyldisilane, hexamethyldisilane and combinationsthereof. An epitaxial germanium layer can be deposited from a germaniumgas source that is selected from the group consisting of germane,digermane, halogermane, dichlorogermane, trichlorogermane,tetrachlorogermane and combinations thereof. While an epitaxial silicongermanium alloy layer can be formed utilizing a combination of such gassources. Carrier gases like hydrogen, nitrogen, helium and argon can beused.

In FIG. 2, fin channels 20 are formed in the base substrate 12, two ofwhich are shown. The number and size of fin channels to be formed can bebased on the intended current handling capacity of the electronic devicestructure. Formation of the fin channels generally includes depositionand lithographic patterning of a hardmask layer 18 followed by ananisotropic etching process. Because there is no stop layer on the basesubstrate 12, the etch process can be time-based. A suitable anisotropicetching process includes reactive ion etching. As shown, because thesacrificial doped layer 16 etches at a faster rate than the basesubstrate 12, undercutting in the sacrificial doped layer is observedbelow the hardmask 18. In contrast, prior processes to form the VTFETwould result in fin channel loss without the protection of thesacrificial doped layer.

The height of the fin channels 20 in the z direction can be in the rangeof about 30 nm to about 400 nm, or in the range of about 50 nm to about300 nm, or in the range of about 75 nm to about 200 nm. In variousembodiments, the width of the fin channels 20 in the x direction can bein the range of about 5 nm to about 30 nm, or about 10 nm to about 20nm. In various embodiments, the aspect ratio of the fin channels 20 canbe in the range of about 3 to about 40, or in the range of about 5 toabout 20, or in the range of about 7 to about 10. In variousembodiments, the fin channels 20 can have a length in the y direction inthe range of about 10 nm to about 2000 nm, or in the range of about 20nm to about 1000 nm, or in the range of about 25 nm to about 500 nm,where the length in the y direction is greater than the width in the xdirection.

The hardmask 18 can include, for example, silicon oxide, silicon nitride(SiN), or any suitable combination of those. The hardmask 18 can bedeposited using a deposition process, including, but not limited to,PVD, CVD, PECVD, or any combination thereof.

In FIG. 3, bottom source/drain regions 22 (e.g., drain regions as wellas the source regions for the completed VTFETs) can be formed by anepitaxial growth process that deposits a crystalline semiconductormaterial onto selected areas of the substrate 12 to form the bottomsource/drain region 22. By way of example, the bottom source/drainregions for pFETs can be formed of SiGe:B, and bottom source/drainregions for nFETs can be formed of Si:P.

In FIG. 4, a bottom spacer layer 24 can be deposited by anynon-conformal deposition methods that provides a faster deposition rateon the planar surface and slower deposition rate on the sidewall surfaceincluding but not limited to plasma vapor deposition (PVD), high densityplasma (HDP) deposition or the like. As shown, the bottom spacer layeris disposed between the vertically oriented fin structures. The PVD orHDP process is highly directional and deposits the spacer onto thebottom of the trenches but less on fin sidewall. After directionaldeposition of bottom spacer, an etch-back process is performed to removethe any residue of spacer materials from the fin sidewall. In PVD, apure source material is gasified via evaporation, the application ofhigh power electricity, laser ablation, or the like. The gasifiedmaterial will then condense on the substrate material to create thedesired layer. The bottom spacer 24 can be a low k dielectric material.The term “low k dielectric” generally refers to an insulating materialhaving a dielectric constant less than silicon dioxide, i.e., less than3.9. Exemplary low k dielectric materials include, but are not limitedto, dielectric nitrides (e.g., silicon nitride, SiBCN), dielectricoxynitrides (e.g., SiOCN), or any combination thereof or the like.

FIG. 5 depicts the semiconductor structure 10 subsequent to junctionformation at the bottom and top regions 26, 28, respectively, for eachfin channel 20. In one or more embodiments, junction formation generallyincludes a high temperature spike anneal process to drive in theselected dopant from the sacrificial doped layer 16 for the top portion28 and from the bottom source/drain 22 for the bottom portion 26 of eachone of the fin channels 20. The high temperature doping generallyincludes a heating the substrate at a temperature of about 950° C. toabout 1000° C. in a nitrogen ambient atmosphere for a period of timeeffective to drive in the desired amount of dopant into the respectivetop portion 28 or bottom portion 26. Advantageously, the sacrificialdoped layer 16 provides doping to form the extension as noted above butalso serves as a protection layer to prevent thinning at the top of thefin channel during processing.

FIG. 6 depicts the semiconductor structure 10 subsequent to high k/metalgate formation. A high k dielectric material 30 is conformally depositedonto the structure followed by deposition of a metal gate material 32.An encapsulation layer 34, i.e., liner layer, is then provided on themetal gate material 32.

The gate dielectric material(s) can be a dielectric material having adielectric constant greater than 3.9, 7.0, or 10.0. Non-limitingexamples of suitable materials for the dielectric materials includeoxides, nitrides, oxynitrides, silicates (e.g., metal silicates),aluminates, titanates, nitrides, or any combination thereof. Examples ofhigh-k materials (with a dielectric constant greater than 7.0) include,but are not limited to, metal oxides such as hafnium oxide, hafniumsilicon oxide, hafnium silicon oxynitride, lanthanum oxide, lanthanumaluminum oxide, zirconium oxide, zirconium silicon oxide, zirconiumsilicon oxynitride, tantalum oxide, titanium oxide, barium strontiumtitanium oxide, barium titanium oxide, strontium titanium oxide, yttriumoxide, aluminum oxide, lead scandium tantalum oxide, and lead zincniobate. The high-k material can further include dopants such as, forexample, lanthanum and aluminum.

The gate dielectric materials can be formed by suitable depositionprocesses, for example, chemical vapor deposition (CVD), plasma-enhancedchemical vapor deposition (PECVD), atomic layer deposition (ALD),evaporation, physical vapor deposition (PVD), chemical solutiondeposition, or other like processes. The thickness of the dielectricmaterial can vary depending on the deposition process as well as thecomposition and number of high-k dielectric materials used. Thedielectric material layer can have a thickness in a range from about 0.5to about 20 nm.

The work function metal(s) can be disposed over the gate dielectricmaterial. The type of work function metal(s) depends on the type oftransistor and can differ between the nFET and pFET devices.Non-limiting examples of suitable work function metals include p-typework function metal materials and n-type work function metal materials.P-type work function materials include compositions such as titaniumnitride, tantalum nitride, ruthenium, palladium, platinum, cobalt,nickel, and conductive metal oxides, or any combination thereof. N-typemetal materials include compositions such as hafnium, zirconium,titanium, tantalum, aluminum, metal carbides (e.g., hafnium carbide,zirconium carbide, titanium carbide, and aluminum carbide), aluminides,or any combination thereof. The work function metal(s) can be depositedby a suitable deposition process, for example, CVD, PECVD, PVD, plating,thermal or e-beam evaporation, and sputtering.

The insulator layer 34 can be the same material as the hard maskmaterial 18. In one or more embodiments, the hardmask layer 18 and theinsulator layer 34 are silicon nitride.

In FIG. 7, an interlayer dielectric 36 such as silicon dioxide is thendeposited onto the structure 10 and chemical mechanical planarization(CMP) process is performed to expose the hardmask 18. The insulatorlayer 36 can be selectively removed by a reactive ion etch process andthe metal gate can be removed by a wet etch, which can vary depending onthe metal gate material.

In FIG. 8, the hardmask 18 is selectively pulled to expose thesacrificial doped layer 16. The hardmask 18 can be selectively removedby a dry or wet etch process. For example, in the case of a siliconnitride hardmask, the silicon nitride can be selectively removedrelative to the interlayer dielectric 36, the metal gate 32 and the highk layer 30 by exposing the substrate to hot phosphoric acid. A portionof the liner layer 34 will also be selectively removed to provide thestructure 10 as shown.

In FIG. 9, the sacrificial doped layer 16 is removed by, for example, awet etch process. By way of example, in the case of a doped siliconmaterial as the sacrificial doped layer 16, the doped silicon materialcan be removed by an ammonia wet etch process stopping on the etch stoplayer 14, e.g., undoped SiGe layer.

In FIG. 10, subsequent to removal of the sacrificial doped layer 16, theetch stop layer 14 is then removed to expose the doped region 28 at thetop of the fin channel 20. By way of example, the etch stop layer 14 canbe undoped SiGe and can be removed using an ammonia/hydrogen peroxidewet etch process. The top of the fin can then be used as a referencepoint to remove the exposed high k dielectric 30 and metal gate 32 whenforming the top spacer.

In FIG. 11, selective removal of the exposed high k dielectric 30 andthe metal gate 32 creates a recess 40 between the doped region 28 of thefin channel 20 and the liner layer 34. By way of example, an etch backprocess using SC-1 wet etch process can be used to remove the metal gate32 and expose the doped region 28 at the top of the fin channel 20followed by an HCl wet etch process to remove the high k dielectric 30,thereby forming the recess 40 as shown between the top doped region 28of the fin channel 20 and the liner layer 34.

In FIG. 12, the top spacer 42 is then deposited into the recess 40between the liner layer 34 and the top doped region 28 of the finchannel 20. The top spacer 42 can be formed of the same material as theliner layer 34, e.g., silicon nitride. An etch back process can be usedto expose the top doped region 28 of the fin channel 20 as shown.

In FIG. 13, the top source/drains 46 are formed by an epitaxial growthprocess on the doped region 28 of the fin channels 20. Advantageously, ahigh temperature spike anneal process is not needed because thejunctions have already been formed. A metal interconnect can then bedeposited to electrically contact the VFET.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments described. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdescribed herein.

What is claimed is:
 1. A method of forming one or more vertical fieldeffect transistors comprising: forming one or more vertical fin channelsin a silicon substrate comprising thereon an epitaxially grown undopedsilicon-germanium layer and a doped epitaxially grown silicon layer onthe undoped silicon germanium layer; epitaxially growing a bottomsource/drain adjacent each of the one or more vertical fin channels;diffusing dopant ions from the bottom source/drain region into eachlower portion of the one or more vertical fin channels to form a dopedbottom portion and diffusing dopant ions from the doped epitaxiallygrown silicon layer into each top portion of the one or more verticalfin channels to form a doped top portion; forming a gate structure abouteach of the one or more vertical fin channels; depositing an interlayerdielectric; patterning the interlayer dielectric and removing the dopedepitaxially grown silicon layer and the epitaxially grown undopedsilicon-germanium layer from the one or more vertical fin channels; andepitaxially growing a top source/drain on the doped top portion of eachof the one or more vertical fin channels to define the one or morevertical field effect transistors.
 2. The method of claim 1, whereindiffusing the dopant ions to form the top and bottom doped portions ineach of the one or more vertical fin channels comprises a hightemperature annealing process at a temperature effective to drive in thedopant ions from the sacrificial dopant layer to the top portion anddrive in dopants from the bottom source/drain region to the bottomportion.
 3. The method of claim 1, wherein the vertical field effecttransistor comprises a pFET.
 4. The method of claim 1, wherein thevertical field effect transistor comprises an nFET.
 5. The method ofclaim 1, wherein selectively removing the doped epitaxially grownsilicon layer and the epitaxially grown undoped silicon-germanium layerfrom the one or more vertical fin channels comprises applying a wet etchchemistry to sequentially remove the doped epitaxially grown siliconlayer and the epitaxially grown undoped silicon-germanium layer from theone or more vertical fin channels.
 6. The method of claim 5, wherein theepitaxially grown undoped silicon-germanium layer from the one or morevertical fin channels functions as an etch stop layer.
 7. The method ofclaim 1, wherein epitaxially growing the top source/drain is free of anannealing step.
 8. The method of claim 1, wherein forming the gatestructure comprises conformally depositing a high k dielectric materialfollowed by deposition of a metal gate material and deposition of a nencapsulation layer on the metal gate material.
 9. The method of claim8, wherein the high k dielectric material has a dielectric constantgreater than 3.9.
 10. The method of claim 8, wherein the high kdielectric comprises hafnium oxide, hafnium silicon oxide, hafniumsilicon oxynitride, lanthanum oxide, lanthanum aluminum oxide, zirconiumoxide, zirconium silicon oxide, zirconium silicon oxynitride, tantalumoxide, titanium oxide, barium strontium titanium oxide, barium titaniumoxide, strontium titanium oxide, yttrium oxide, aluminum oxide, leadscandium tantalum oxide, or lead zinc niobate.
 11. The method of claim8, wherein the high k dielectric further comprises lanthanum or aluminumdopants.